Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Andrea Opreni; Alessandra Vizzaccaro; Nicolo Boni; Roberto Carminati; Gianluca Mendicino; Cyril Touze; Attilio Frangi

doi:10.1109/MEMS51670.2022.9699545

Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Andrea Opreni^*
, Alessandra Vizzaccaro
, Nicolo Boni
, Roberto Carminati
, Gianluca Mendicino
, Cyril Touze
, Attilio Frangi

^*Corresponding author for this work

School of Engineering Mathematics and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

5 Citations (Scopus)

Abstract

The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Publisher	IEEE Computer Society
Pages	491-494
Number of pages	4
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699545
Publication status	Published - 11 Feb 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	IEEE Symposium on Mass Storage Systems and Technologies
Volume	2022-January
ISSN (Print)	2160-195X
ISSN (Electronic)	2160-1968

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

Bibliographical note

Publisher Copyright:
© 2022 IEEE.

Keywords

Invariant Manifold
Micromirrors
Model Order Reduction
Piezoelectric

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Opreni, A., Vizzaccaro, A., Boni, N., Carminati, R., Mendicino, G., Touze, C., & Frangi, A. (2022). Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 491-494). (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January). IEEE Computer Society. https://doi.org/10.1109/MEMS51670.2022.9699545

Opreni, Andrea ; Vizzaccaro, Alessandra ; Boni, Nicolo et al. / Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. pp. 491-494 (IEEE Symposium on Mass Storage Systems and Technologies).

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title = "Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds",

abstract = "The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance. ",

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author = "Andrea Opreni and Alessandra Vizzaccaro and Nicolo Boni and Roberto Carminati and Gianluca Mendicino and Cyril Touze and Attilio Frangi",

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Opreni, A, Vizzaccaro, A, Boni, N, Carminati, R, Mendicino, G, Touze, C & Frangi, A 2022, Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Symposium on Mass Storage Systems and Technologies, vol. 2022-January, IEEE Computer Society, pp. 491-494, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699545

Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. / Opreni, Andrea; Vizzaccaro, Alessandra; Boni, Nicolo et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society, 2022. p. 491-494 (IEEE Symposium on Mass Storage Systems and Technologies; Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

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T1 - Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

AU - Opreni, Andrea

AU - Vizzaccaro, Alessandra

AU - Boni, Nicolo

AU - Carminati, Roberto

AU - Mendicino, Gianluca

AU - Touze, Cyril

AU - Frangi, Attilio

PY - 2022/2/11

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N2 - The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

AB - The Direct Parametrisation of Invariant Manifolds (DPIM) is an innovative technique for Model Order Reduction (MOR) suitable for Micro-Electro-Mechanical Systems (MEMS) that operate at resonance, as most gyroscopes and scanning micromirrors. The computational performance and the sound mathematical foundation of the method allows identifying the nonlinear dynamic response of MEMS within short time spans and in a ulation-free con. For the first time, predictions of the method are compared with experimental data. Results highlight the remarkable industrial impact of the technique for accelerating the design of MEMS structures actuated at resonance.

KW - Invariant Manifold

KW - Micromirrors

KW - Model Order Reduction

KW - Piezoelectric

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T3 - IEEE Symposium on Mass Storage Systems and Technologies

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Opreni A, Vizzaccaro A, Boni N, Carminati R, Mendicino G, Touze C et al. Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. IEEE Computer Society. 2022. p. 491-494. (IEEE Symposium on Mass Storage Systems and Technologies). doi: 10.1109/MEMS51670.2022.9699545

Fast and Accurate Predictions of MEMS Micromirrors Nonlinear Dynamic Response Using Direct Computation of Invariant Manifolds

Abstract

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Bibliographical note

Keywords

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