@article{9f7c4b2406e64d1c896546b172943922,
title = "Focused ion beam etching for the fabrication of micropillar microcavities made of III-V semiconductor materials",
author = "Y-LD Ho and R Gibson and C Hu and MJ Cryan and JG Rarity and PJ Heard and JA Timpson and AM Fox and MS Skolnick and M Hopkinson and A Tahraoui",
year = "2007",
month = jun,
doi = "10.1116/1.2749528",
language = "English",
volume = "25(4)",
pages = "1197 -- 1202",
journal = "Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
}