Focused ion beam etching of nanometer-size GaN/AlGaN device structures and their optical characterization by micro-photoluminescence/Raman mapping

MHH Kuball, M Benyoucef, FHJ Morrissey, CT Foxon

Research output: Contribution to journalArticle (Academic Journal)peer-review

Translated title of the contributionFocused ion beam etching of nanometer-size GaN/AlGaN device structures and their optical characterization by micro-photoluminescence/Raman mapping
Original languageEnglish
Article numberW12
Pages (from-to)3 - 3
Number of pages1
JournalMRS Internet J. Nitride Semicond. Res
Volume5S1
Publication statusPublished - 2000

Bibliographical note

Publisher: Materials Research Society

Structured keywords

  • CDTR

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