Translated title of the contribution | Focused ion beam etching of nanometer-size GaN/AlGaN device structures and their optical characterization by micro-photoluminescence/Raman mapping |
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Original language | English |
Article number | W12 |
Pages (from-to) | 3 - 3 |
Number of pages | 1 |
Journal | MRS Internet J. Nitride Semicond. Res |
Volume | 5S1 |
Publication status | Published - 2000 |
Bibliographical note
Publisher: Materials Research SocietyStructured keywords
- CDTR