Focused ion beam etching of photonic crystals on silicon on insulator

SK Balasubramanian, PJ Heard, MJ Cryan

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionFocused ion beam etching of photonic crystals on silicon on insulator
Original languageEnglish
Title of host publicationEMGA-NANO 2005: Institute of Physics: Electron Microscopy and Analysis Group and the Nanoscale Physics and Technology Group Conference 2005, Leeds, UK
Publication statusPublished - Aug 2005

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