Focused ion beam etching of photonic crystals on silicon on insulator

SK Balasubramanian; PJ Heard; MJ Cryan

Focused ion beam etching of photonic crystals on silicon on insulator

SK Balasubramanian
, PJ Heard
, MJ Cryan

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Focused ion beam etching of photonic crystals on silicon on insulator
Original language	English
Title of host publication	EMGA-NANO 2005: Institute of Physics: Electron Microscopy and Analysis Group and the Nanoscale Physics and Technology Group Conference 2005, Leeds, UK
Publication status	Published - Aug 2005

Research Groups and Themes

Photonics and Quantum

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Cite this

@inproceedings{da1742cda4a74da6b379640c8d2f6017,

title = "Focused ion beam etching of photonic crystals on silicon on insulator",

author = "SK Balasubramanian and PJ Heard and MJ Cryan",

year = "2005",

month = aug,

language = "English",

booktitle = "EMGA-NANO 2005: Institute of Physics: Electron Microscopy and Analysis Group and the Nanoscale Physics and Technology Group Conference 2005, Leeds, UK",

}

Focused ion beam etching of photonic crystals on silicon on insulator. / Balasubramanian, SK; Heard, PJ; Cryan, MJ.
EMGA-NANO 2005: Institute of Physics: Electron Microscopy and Analysis Group and the Nanoscale Physics and Technology Group Conference 2005, Leeds, UK. 2005.

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Focused ion beam etching of photonic crystals on silicon on insulator

AU - Balasubramanian, SK

AU - Heard, PJ

AU - Cryan, MJ

PY - 2005/8

Y1 - 2005/8

M3 - Conference Contribution (Conference Proceeding)

BT - EMGA-NANO 2005: Institute of Physics: Electron Microscopy and Analysis Group and the Nanoscale Physics and Technology Group Conference 2005, Leeds, UK

ER -