@inproceedings{3300d41db599455fa775eee4b7215682,
title = "Focused ion beam fabrication and properties of nanoscale Josephson junctions for sensors and other applications",
abstract = "The methods of superconducting device fabrication by lithography and multilevel processing usually require a number of processing steps with lithographic resolution and alignment adequate for the scale of the device be fabricated. As an alternative, the focused ion beam (FIB) microscope is increasingly being used directly to fabricate devices. A major advantage of using a FIB compared to other lithography methods is its flexibility and high resolution. It allows in-situ, milling (similar to 5 nm at a beam current of 1 pA) to a variety of depths, and imaging (2 nm) of the sample. In this paper we describe our development of junction fabrication techniques using the FIB and their application in creating a range of potential sensor devices and quantum electronics applications. (c) 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim.",
keywords = "QUANTUM INTERFERENCE DEVICE, ASYMMETRY MODULATED SQUIDS, NORMAL METAL BILAYERS, VOLTAGE STANDARDS, REALIZATION, TECHNOLOGY, STATES",
author = "MG Blamire and C Bell and G Burnell and DJ Kang and A Ruotolo and G Testa and Chris Bell",
year = "2005",
doi = "10.1002/pssc.200460826",
language = "English",
isbn = "*************",
series = "PHYSICA STATUS SOLIDI C-CURRENT TOPICS IN SOLID STATE PHYSICS",
publisher = "Wiley-VCH Verlag",
pages = "1455--1462",
editor = "M Stutzmann",
booktitle = "Physica Status Solidi C - Conferences and Critical Reviews, Vol 2, No 5",
address = "Germany",
note = "NATO Advanced Research Workshop on Advanced Materials for Radiation Detectors and Sensors/Symposium on Superconductors held at the 2004 E-MRS Fall Meeting ; Conference date: 06-09-2004 Through 10-09-2004",
}