Focused ion beam (FIB) etching for the fabrication of micro-pillar microcavities made of III-V semiconductor materials

Y-LD Ho; R Gibson; C Hu; MJ Cryan; JG Rarity; PJ Heard; JA Timpson; AM Fox; MS Skolnick; M Hopkinson; A Tahraoui

Focused ion beam (FIB) etching for the fabrication of micro-pillar microcavities made of III-V semiconductor materials

Y-LD Ho, R Gibson, C Hu, MJ Cryan, JG Rarity, PJ Heard, JA Timpson, AM Fox, MS Skolnick, M Hopkinson, A Tahraoui

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Focused ion beam (FIB) etching for the fabrication of micro-pillar microcavities made of III-V semiconductor materials
Original language	English
Title of host publication	NanoFIB, Manchester, UK
Publication status	Published - 2007

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Conference Organiser: Royal Microscopical Society

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@inproceedings{9e854153635746fca7c257bfde12e5c0,

title = "Focused ion beam (FIB) etching for the fabrication of micro-pillar microcavities made of III-V semiconductor materials",

author = "Y-LD Ho and R Gibson and C Hu and MJ Cryan and JG Rarity and PJ Heard and JA Timpson and AM Fox and MS Skolnick and M Hopkinson and A Tahraoui",

note = "Conference Organiser: Royal Microscopical Society",

year = "2007",

language = "English",

booktitle = "NanoFIB, Manchester, UK",

}

TY - GEN

T1 - Focused ion beam (FIB) etching for the fabrication of micro-pillar microcavities made of III-V semiconductor materials

AU - Ho, Y-LD

AU - Gibson, R

AU - Hu, C

AU - Cryan, MJ

AU - Rarity, JG

AU - Heard, PJ

AU - Timpson, JA

AU - Fox, AM

AU - Skolnick, MS

AU - Hopkinson, M

AU - Tahraoui, A

N1 - Conference Organiser: Royal Microscopical Society

PY - 2007

Y1 - 2007

M3 - Conference Contribution (Conference Proceeding)

BT - NanoFIB, Manchester, UK

ER -