Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides

MP Taylor, PL Timms, GC Allen, SR Church

Research output: Contribution to journalArticle (Academic Journal)peer-review

4 Citations (Scopus)
Translated title of the contributionFormation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides
Original languageEnglish
Pages (from-to)1769 - 1771
JournalJournal of Materials Chemistry
Volume8
Publication statusPublished - 1998

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