Translated title of the contribution | Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides |
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Original language | English |
Pages (from-to) | 1769 - 1771 |
Journal | Journal of Materials Chemistry |
Volume | 8 |
Publication status | Published - 1998 |
Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides
MP Taylor, PL Timms, GC Allen, SR Church
Research output: Contribution to journal › Article (Academic Journal) › peer-review
4
Citations
(Scopus)