Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides

MP Taylor, PL Timms, GC Allen, SR Church

Research output: Contribution to journal › Article (Academic Journal) › peer-review

4 Citations (Scopus)

Translated title of the contribution	Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides
Original language	English
Pages (from-to)	1769 - 1771
Journal	Journal of Materials Chemistry
Volume	8
Publication status	Published - 1998

Cite this

@article{ce6f847c46fe482993a70c7578e5a6e7,

title = "Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides",

author = "MP Taylor and PL Timms and GC Allen and SR Church",

year = "1998",

language = "English",

volume = "8",

pages = "1769 -- 1771",

journal = "Journal of Materials Chemistry",

issn = "0959-9428",

publisher = "Royal Society of Chemistry",

}

TY - JOUR

T1 - Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides

AU - Taylor, MP

AU - Timms, PL

AU - Allen, GC

AU - Church, SR

PY - 1998

Y1 - 1998

M3 - Article (Academic Journal)

VL - 8

SP - 1769

EP - 1771

JO - Journal of Materials Chemistry

JF - Journal of Materials Chemistry

SN - 0959-9428

ER -