Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides

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Translated title of the contribution	Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides
Original language	English
Pages (from-to)	1769 - 1771
Journal	Journal of Materials Chemistry
Volume	8
Publication status	Published - 1998

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@article{ce6f847c46fe482993a70c7578e5a6e7,

title = "Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides",

author = "MP Taylor and PL Timms and GC Allen and SR Church",

year = "1998",

language = "English",

volume = "8",

pages = "1769 -- 1771",

journal = "Journal of Materials Chemistry",

issn = "1364-5501",

publisher = "Royal Society of Chemistry",

}

TY - JOUR

T1 - Formation of oxide thin films from reactions of hydrogen peroxide vapour with gas mixtures containing silane and other hydrides

AU - Taylor, MP

AU - Timms, PL

AU - Allen, GC

AU - Church, SR

PY - 1998

Y1 - 1998

M3 - Article (Academic Journal)

SN - 1364-5501

VL - 8

SP - 1769

EP - 1771

JO - Journal of Materials Chemistry

JF - Journal of Materials Chemistry

ER -