Fully Microelectromechanical Non-Volatile Memory Cell

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

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This paper reports the first non-volatile memory cell composed entirely of MEM relays that does not need CMOS circuitry for reading or writing. The cell uses a 7-terminal non-volatile relay for information storage and two 3-terminal relays for read and write access. This three-relay cell has been fabricated and characterised to demonstrate read and write operations. The cell architecture has been designed such that multiple cells can be tiled in combination with a relay-based multiplexer to make a digital all MEM reprogrammable non-volatile memory. Such a memory will have near zero standby power and ability to operate in harsh environments beyond the capabilities of conventional memory technologies.
Original languageEnglish
Title of host publication2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Electronic)978-1-6654-9308-6
ISBN (Print)978-1-6654-9309-3
Publication statusPublished - 1 Mar 2023
EventThe 36th International Conference on Micro Electro Mechanical Systems - Walther-von-Dyck Straße 10 85748 Garching bei München Germany, Munich, Germany
Duration: 15 Jan 202319 Jan 2023
Conference number: 49605X

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)1084-6999


ConferenceThe 36th International Conference on Micro Electro Mechanical Systems
Abbreviated titleIEEE MEMS 2023
Internet address

Bibliographical note

Funding Information:
This work received funding from the European Union’s Horizon 2020 research and innovation programme under grant agreement No 871740 (ZeroAMP).

Publisher Copyright:
© 2023 IEEE.

Structured keywords

  • Photonics and Quantum


  • MEMS
  • Microswitches
  • Nonvolatile memory
  • Radiation hardening (electronics)
  • High-temperature


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