Research output per year
Research output per year
Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)
Original language | English |
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Title of host publication | 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems, MEMS 2023 |
Publisher | Institute of Electrical and Electronics Engineers (IEEE) |
Pages | 507-510 |
Number of pages | 4 |
ISBN (Electronic) | 978-1-6654-9308-6 |
ISBN (Print) | 978-1-6654-9309-3 |
DOIs | |
Publication status | Published - 1 Mar 2023 |
Event | The 36th International Conference on Micro Electro Mechanical Systems - Walther-von-Dyck Straße 10 85748 Garching bei München Germany, Munich, Germany Duration: 15 Jan 2023 → 19 Jan 2023 Conference number: 49605X https://mems23.org/ |
Name | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
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Volume | 2023-January |
ISSN (Print) | 1084-6999 |
Conference | The 36th International Conference on Micro Electro Mechanical Systems |
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Abbreviated title | IEEE MEMS 2023 |
Country/Territory | Germany |
City | Munich |
Period | 15/01/23 → 19/01/23 |
Internet address |
Research output: Contribution to journal › Letter (Academic Journal) › peer-review