GaN-on-diamond: Robust mechanical and thermal properties

Huarui Sun, Dong Liu, James W. Pomeroy, Daniel Francis, Firooz Faili, Daniel J. Twitchen, Martin Kuball

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

6 Citations (Scopus)
170 Downloads (Pure)

Abstract

Achieving robust mechanical and thermal properties in GaN-on-diamond is critically important for reliable next-generation high-power electronics based on this material system. The work described here demonstrates that excellent stress management and interfacial strength has been achieved, as well as homogeneous interfacial thermal properties across the wafer for the latest GaN-on-diamond technology.
Original languageEnglish
Title of host publicationCS MANTECH 2016
Subtitle of host publicationInternational Conference on Compound Semiconductor Manufacturing Technology
PublisherCS Mantech
Pages201-203
Number of pages3
Publication statusPublished - 27 May 2016
Event31st Annual International Conference on Compound Semiconductor Manufacturing Technology, CS ManTech 2016 - Miami, United States
Duration: 16 May 201619 May 2016

Conference

Conference31st Annual International Conference on Compound Semiconductor Manufacturing Technology, CS ManTech 2016
Country/TerritoryUnited States
CityMiami
Period16/05/1619/05/16

Research Groups and Themes

  • CDTR

Keywords

  • GaN-on-diamond
  • Interfacial strength
  • Reliability
  • Stress
  • Thermal boundary resistance
  • Wafer mapping

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