Abstract
Achieving robust mechanical and thermal properties in GaN-on-diamond is critically important for reliable next-generation high-power electronics based on this material system. The work described here demonstrates that excellent stress management and interfacial strength has been achieved, as well as homogeneous interfacial thermal properties across the wafer for the latest GaN-on-diamond technology.
| Original language | English |
|---|---|
| Title of host publication | CS MANTECH 2016 |
| Subtitle of host publication | International Conference on Compound Semiconductor Manufacturing Technology |
| Publisher | CS Mantech |
| Pages | 201-203 |
| Number of pages | 3 |
| Publication status | Published - 27 May 2016 |
| Event | 31st Annual International Conference on Compound Semiconductor Manufacturing Technology, CS ManTech 2016 - Miami, United States Duration: 16 May 2016 → 19 May 2016 |
Conference
| Conference | 31st Annual International Conference on Compound Semiconductor Manufacturing Technology, CS ManTech 2016 |
|---|---|
| Country/Territory | United States |
| City | Miami |
| Period | 16/05/16 → 19/05/16 |
Research Groups and Themes
- CDTR
Keywords
- GaN-on-diamond
- Interfacial strength
- Reliability
- Stress
- Thermal boundary resistance
- Wafer mapping