Hierarchical surface patterning for triboelectric nanogenerators and sensors

Majid Taghavi, Carlo Filippeschi, Barbara Mazzolai, Lucia Beccai

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

4 Citations (Scopus)


We develop PDMS and PMMA triboelectric surfaces with micro/nanopatterning via simple and effective methods, and starting from Si substrates anisotropically etched with low KOH concentration solution. A hierarchical structure formed by micro-pyramidal structures with superficial nano-roughness, is developed in a 200 μm PDMS layer. In parallel, by means of a PDMS stamp and nanoimprinting technology, a 2 μm film of PMMA is nanopatterned, showing the feasibility of large scale production of such surfaces using a cost effective and easily repeatable process. We show SEM and AFM characterization of the negative (PDMS) and positive (PMMA) triboelectric surfaces and demonstrate how contact keys, integrating the fabricated soft materials, can be used to investigate the signals generated from the repetitive mechanical stimulation of its taxels.

Original languageEnglish
Title of host publicationIEEE-NANO 2015 - 15th International Conference on Nanotechnology
PublisherInstitute of Electrical and Electronics Engineers (IEEE)
Number of pages4
ISBN (Print)9781467381550
Publication statusE-pub ahead of print - 20 Jan 2016
Event15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 - Rome, Italy
Duration: 27 Jul 201530 Jul 2015


Conference15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015


  • Energy Applications
  • Nanocharacterization
  • Nanofabrication
  • Nanoimprint
  • Triboelectric Nanogenerator


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