Hierarchical surface patterning for triboelectric nanogenerators and sensors

Majid Taghavi; Carlo Filippeschi; Barbara Mazzolai; Lucia Beccai

doi:10.1109/NANO.2015.7388827

Hierarchical surface patterning for triboelectric nanogenerators and sensors

Majid Taghavi, Carlo Filippeschi, Barbara Mazzolai, Lucia Beccai

Department of Engineering Mathematics

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

4 Citations (Scopus)

Abstract

We develop PDMS and PMMA triboelectric surfaces with micro/nanopatterning via simple and effective methods, and starting from Si substrates anisotropically etched with low KOH concentration solution. A hierarchical structure formed by micro-pyramidal structures with superficial nano-roughness, is developed in a 200 μm PDMS layer. In parallel, by means of a PDMS stamp and nanoimprinting technology, a 2 μm film of PMMA is nanopatterned, showing the feasibility of large scale production of such surfaces using a cost effective and easily repeatable process. We show SEM and AFM characterization of the negative (PDMS) and positive (PMMA) triboelectric surfaces and demonstrate how contact keys, integrating the fabricated soft materials, can be used to investigate the signals generated from the repetitive mechanical stimulation of its taxels.

Original language	English
Title of host publication	IEEE-NANO 2015 - 15th International Conference on Nanotechnology
Publisher	Institute of Electrical and Electronics Engineers (IEEE)
Pages	1147-1150
Number of pages	4
ISBN (Print)	9781467381550
DOIs	https://doi.org/10.1109/NANO.2015.7388827
Publication status	E-pub ahead of print - 20 Jan 2016
Event	15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015 - Rome, Italy Duration: 27 Jul 2015 → 30 Jul 2015

Conference

Conference	15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015
Country/Territory	Italy
City	Rome
Period	27/07/15 → 30/07/15

Keywords

Energy Applications
Nanocharacterization
Nanofabrication
Nanoimprint
Triboelectric Nanogenerator

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10.1109/NANO.2015.7388827

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Taghavi, M., Filippeschi, C., Mazzolai, B., & Beccai, L. (2016). Hierarchical surface patterning for triboelectric nanogenerators and sensors. In IEEE-NANO 2015 - 15th International Conference on Nanotechnology (pp. 1147-1150). Article 7388827 Institute of Electrical and Electronics Engineers (IEEE). Advance online publication. https://doi.org/10.1109/NANO.2015.7388827

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title = "Hierarchical surface patterning for triboelectric nanogenerators and sensors",

abstract = "We develop PDMS and PMMA triboelectric surfaces with micro/nanopatterning via simple and effective methods, and starting from Si substrates anisotropically etched with low KOH concentration solution. A hierarchical structure formed by micro-pyramidal structures with superficial nano-roughness, is developed in a 200 μm PDMS layer. In parallel, by means of a PDMS stamp and nanoimprinting technology, a 2 μm film of PMMA is nanopatterned, showing the feasibility of large scale production of such surfaces using a cost effective and easily repeatable process. We show SEM and AFM characterization of the negative (PDMS) and positive (PMMA) triboelectric surfaces and demonstrate how contact keys, integrating the fabricated soft materials, can be used to investigate the signals generated from the repetitive mechanical stimulation of its taxels.",

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author = "Majid Taghavi and Carlo Filippeschi and Barbara Mazzolai and Lucia Beccai",

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Taghavi, M, Filippeschi, C, Mazzolai, B & Beccai, L 2016, Hierarchical surface patterning for triboelectric nanogenerators and sensors. in IEEE-NANO 2015 - 15th International Conference on Nanotechnology., 7388827, Institute of Electrical and Electronics Engineers (IEEE), pp. 1147-1150, 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015, Rome, Italy, 27/07/15. https://doi.org/10.1109/NANO.2015.7388827

Hierarchical surface patterning for triboelectric nanogenerators and sensors. / Taghavi, Majid; Filippeschi, Carlo; Mazzolai, Barbara et al.
IEEE-NANO 2015 - 15th International Conference on Nanotechnology. Institute of Electrical and Electronics Engineers (IEEE), 2016. p. 1147-1150 7388827.

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Hierarchical surface patterning for triboelectric nanogenerators and sensors

AU - Taghavi, Majid

AU - Filippeschi, Carlo

AU - Mazzolai, Barbara

AU - Beccai, Lucia

PY - 2016/1/20

Y1 - 2016/1/20

N2 - We develop PDMS and PMMA triboelectric surfaces with micro/nanopatterning via simple and effective methods, and starting from Si substrates anisotropically etched with low KOH concentration solution. A hierarchical structure formed by micro-pyramidal structures with superficial nano-roughness, is developed in a 200 μm PDMS layer. In parallel, by means of a PDMS stamp and nanoimprinting technology, a 2 μm film of PMMA is nanopatterned, showing the feasibility of large scale production of such surfaces using a cost effective and easily repeatable process. We show SEM and AFM characterization of the negative (PDMS) and positive (PMMA) triboelectric surfaces and demonstrate how contact keys, integrating the fabricated soft materials, can be used to investigate the signals generated from the repetitive mechanical stimulation of its taxels.

AB - We develop PDMS and PMMA triboelectric surfaces with micro/nanopatterning via simple and effective methods, and starting from Si substrates anisotropically etched with low KOH concentration solution. A hierarchical structure formed by micro-pyramidal structures with superficial nano-roughness, is developed in a 200 μm PDMS layer. In parallel, by means of a PDMS stamp and nanoimprinting technology, a 2 μm film of PMMA is nanopatterned, showing the feasibility of large scale production of such surfaces using a cost effective and easily repeatable process. We show SEM and AFM characterization of the negative (PDMS) and positive (PMMA) triboelectric surfaces and demonstrate how contact keys, integrating the fabricated soft materials, can be used to investigate the signals generated from the repetitive mechanical stimulation of its taxels.

KW - Energy Applications

KW - Nanocharacterization

KW - Nanofabrication

KW - Nanoimprint

KW - Triboelectric Nanogenerator

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M3 - Conference Contribution (Conference Proceeding)

AN - SCOPUS:84964329189

SN - 9781467381550

SP - 1147

EP - 1150

BT - IEEE-NANO 2015 - 15th International Conference on Nanotechnology

PB - Institute of Electrical and Electronics Engineers (IEEE)

T2 - 15th IEEE International Conference on Nanotechnology, IEEE-NANO 2015

Y2 - 27 July 2015 through 30 July 2015

ER -

Hierarchical surface patterning for triboelectric nanogenerators and sensors

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