High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

Stefano Valle; Krishna C. Balram

doi:10.1364/OL.44.003777

High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

Stefano Valle, Krishna C. Balram^*

^*Corresponding author for this work

Research output: Contribution to journal › Letter (Academic Journal) › peer-review

10 Citations (Scopus)

230 Downloads (Pure)

Abstract

We report the design and characterization of high-frequency, resonant acousto-optic modulators (AOMs) in a micro-electro-mechanical systems (MEMS) foundry process. The doubly resonant cavity design, with short (L ∼10.5 μm) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators, low-cost integrated free-space optical links, and optically enhanced low-noise RF receivers.

Original language	English
Pages (from-to)	3777-3780
Number of pages	4
Journal	Optics Letters
Volume	44
Issue number	15
DOIs	https://doi.org/10.1364/OL.44.003777
Publication status	Published - 24 Jul 2019

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Bristol Quantum Information Institute
QETLabs
Photonics and Quantum

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10.1364/OL.44.003777

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This is the author accepted manuscript (AAM). The final published version (version of record) is available online via Optical Society of America at https://www.osapublishing.org/ol/abstract.cfm?uri=ol-44-15-3777&origin=search. Please refer to any applicable terms of use of the publisher.
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title = "High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform",

abstract = "We report the design and characterization of high-frequency, resonant acousto-optic modulators (AOMs) in a micro-electro-mechanical systems (MEMS) foundry process. The doubly resonant cavity design, with short (L ∼10.5 μm) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators, low-cost integrated free-space optical links, and optically enhanced low-noise RF receivers.",

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doi = "10.1364/OL.44.003777",

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AU - Valle, Stefano

AU - Balram, Krishna C.

PY - 2019/7/24

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N2 - We report the design and characterization of high-frequency, resonant acousto-optic modulators (AOMs) in a micro-electro-mechanical systems (MEMS) foundry process. The doubly resonant cavity design, with short (L ∼10.5 μm) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators, low-cost integrated free-space optical links, and optically enhanced low-noise RF receivers.

AB - We report the design and characterization of high-frequency, resonant acousto-optic modulators (AOMs) in a micro-electro-mechanical systems (MEMS) foundry process. The doubly resonant cavity design, with short (L ∼10.5 μm) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators, low-cost integrated free-space optical links, and optically enhanced low-noise RF receivers.

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U2 - 10.1364/OL.44.003777

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M3 - Letter (Academic Journal)

C2 - 31368966

AN - SCOPUS:85070917193

SN - 0146-9592

VL - 44

SP - 3777

EP - 3780

JO - Optics Letters

JF - Optics Letters

IS - 15

ER -

High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

Abstract

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SBS3-5: 8031 H2020 SBS3-5 758843

QuPIC: Quantum Technology Capital: Quantum Photonic Integrated Circuits

Datasets for Acousto-optic modulators built using PiezoMUMPS process

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High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

Abstract

Research Groups and Themes

Access to Document

Handle.net

Other files and links

Fingerprint

Projects

SBS3-5: 8031 H2020 SBS3-5 758843

QuPIC: Quantum Technology Capital: Quantum Photonic Integrated Circuits

Datasets

Datasets for Acousto-optic modulators built using PiezoMUMPS process

Cite this