High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators

Zeru Wu, Zengkai Shao, Zihan Xu, Yanfeng Zhang, Lin Liu, Chunchuan Yang, Yujie Chen, Siyuan Yu

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

8 Citations (Scopus)

Abstract

We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10 6 at 1547.6 nm, and >0.8×10 6 throughout 1500-1600 nm.

Original languageEnglish
Title of host publication2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
Subtitle of host publication2018, 29 July–3 August, Hong Kong, China
PublisherOptical Society of America (OSA)
Number of pages2
ISBN (Electronic)9781943580453
DOIs
Publication statusPublished - 25 Apr 2019
Event2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 - Wanchai, Hong Kong
Duration: 29 Jul 20183 Aug 2018

Conference

Conference2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
CountryHong Kong
CityWanchai
Period29/07/183/08/18

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