High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators

Zeru Wu; Zengkai Shao; Zihan Xu; Yanfeng Zhang; Lin Liu; Chunchuan Yang; Yujie Chen; Siyuan Yu

doi:10.1364/CLEOPR.2018.W4D.5

High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators

Zeru Wu
, Zengkai Shao
, Zihan Xu
, Yanfeng Zhang
, Lin Liu
, Chunchuan Yang
, Yujie Chen
, Siyuan Yu

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

14 Citations (Scopus)

Abstract

We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10 ⁶ at 1547.6 nm, and >0.8×10 ⁶ throughout 1500-1600 nm.

Original language	English
Title of host publication	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
Subtitle of host publication	2018, 29 July–3 August, Hong Kong, China
Publisher	Optical Society of America (OSA)
Number of pages	2
ISBN (Electronic)	9781943580453
DOIs	https://doi.org/10.1364/CLEOPR.2018.W4D.5
Publication status	Published - 25 Apr 2019
Event	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 - Wanchai, Hong Kong Duration: 29 Jul 2018 → 3 Aug 2018

Conference

Conference	2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018
Country/Territory	Hong Kong
City	Wanchai
Period	29/07/18 → 3/08/18

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Wu, Z., Shao, Z., Xu, Z., Zhang, Y., Liu, L., Yang, C., Chen, Y., & Yu, S. (2019). High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators. In 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018: 2018, 29 July–3 August, Hong Kong, China Article 8699426 Optical Society of America (OSA). https://doi.org/10.1364/CLEOPR.2018.W4D.5

@inproceedings{eabcccac2fe141d6ab71219dfb1be496,

title = "High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators",

abstract = " We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10 6 at 1547.6 nm, and >0.8×10 6 throughout 1500-1600 nm. ",

author = "Zeru Wu and Zengkai Shao and Zihan Xu and Yanfeng Zhang and Lin Liu and Chunchuan Yang and Yujie Chen and Siyuan Yu",

year = "2019",

month = apr,

day = "25",

doi = "10.1364/CLEOPR.2018.W4D.5",

language = "English",

booktitle = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018",

publisher = "Optical Society of America (OSA)",

address = "United States",

note = "2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018 ; Conference date: 29-07-2018 Through 03-08-2018",

}

Wu, Z, Shao, Z, Xu, Z, Zhang, Y, Liu, L, Yang, C, Chen, Y & Yu, S 2019, High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators. in 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018: 2018, 29 July–3 August, Hong Kong, China., 8699426, Optical Society of America (OSA), 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018, Wanchai, Hong Kong, 29/07/18. https://doi.org/10.1364/CLEOPR.2018.W4D.5

High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators. / Wu, Zeru; Shao, Zengkai; Xu, Zihan et al.
2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018: 2018, 29 July–3 August, Hong Kong, China. Optical Society of America (OSA), 2019. 8699426.

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - High Quality Factor Deuterated Silicon Nitride (SiN

T2 - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

AU - Wu, Zeru

AU - Shao, Zengkai

AU - Xu, Zihan

AU - Zhang, Yanfeng

AU - Liu, Lin

AU - Yang, Chunchuan

AU - Chen, Yujie

AU - Yu, Siyuan

PY - 2019/4/25

Y1 - 2019/4/25

N2 - We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10 6 at 1547.6 nm, and >0.8×10 6 throughout 1500-1600 nm.

AB - We demonstrate low-loss deuterated SiN microring resonators fabricated by low-temperature plasma-deposition technique with a high intrinsic quality factor of up to 1.2× 10 6 at 1547.6 nm, and >0.8×10 6 throughout 1500-1600 nm.

UR - https://www.scopus.com/pages/publications/85065615958

U2 - 10.1364/CLEOPR.2018.W4D.5

DO - 10.1364/CLEOPR.2018.W4D.5

M3 - Conference Contribution (Conference Proceeding)

AN - SCOPUS:85065615958

BT - 2018 Conference on Lasers and Electro-Optics Pacific Rim, CLEO-PR 2018

PB - Optical Society of America (OSA)

Y2 - 29 July 2018 through 3 August 2018

ER -

High Quality Factor Deuterated Silicon Nitride (SiN: D) Microring Resonators

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