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High-frequency, resonant acousto-optic modulators fabricated in a MEMS foundry platform

Research output: Contribution to journalLetter

Original languageEnglish
Pages (from-to)3777-3780
Number of pages4
JournalOptics Letters
Issue number15
DateAccepted/In press - 29 Jun 2019
DatePublished (current) - 24 Jul 2019


We report the design and characterization of high-frequency, resonant acousto-optic modulators (AOMs) in a micro-electro-mechanical systems (MEMS) foundry process. The doubly resonant cavity design, with short (L ∼10.5 μm) acoustic and optical cavity lengths, allows us to measure acousto-optic modulation at GHz frequencies with high modulation efficiency. In contrast to traditional AOMs, these devices rely on the perturbation induced by the displacement of cavity boundaries, which can be significantly enhanced in a suspended geometry. This platform can serve as the building block for fast 2D spatial light modulators, low-cost integrated free-space optical links, and optically enhanced low-noise RF receivers.



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