Abstract
Transmission electron microscopy has been used to investigate the core structure of threading dislocations in heavily Mg-doped (10(20) cm(-3)) Al0.03Ga0.97N films grown on (000 1) sapphire by metal-organic chemical vapour deposition. Evidence is presented that Mg segregates to edge and mixed dislocations, and that these dislocations often have open cores with diameters in the range 1-5nm. The mechanism of hollow core formation and the role of Mg are discussed.
Translated title of the contribution | Hollow core dislocations in Mg-doped AlGaN |
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Original language | English |
Pages (from-to) | 609 - 614 |
Journal | Material Research Society Symposium Proceedings |
Volume | 743 |
Issue number | Symposium L – GaN and Related Alloys |
Publication status | Published - 2003 |
Bibliographical note
Editors: Wetzel C, Yu ET, Speck JS, Arakawa YISBN: 155899680X
Publisher: Materials Research Society
Name and Venue of Conference: Symposium on GaN and Related Alloys, 2002 MRS Fall Meeting, Boston
Conference Organiser: Materials Research Society