Hybrid light-emitting polymer/SiNx platform for photonic integration

Zeming Fan, Zeru Wu, Yujie Chen, Zengkai Shao, Yanfeng Zhang, Zhiren Qiu, Siyuan Yu

Research output: Contribution to journalArticle (Academic Journal)peer-review

4 Citations (Scopus)
278 Downloads (Pure)


Organic semiconductors have potentials for a broad range of applications. However, they are difficult to be integrated with traditional inorganic material to meet the need of further applications. Based on low-temperature silicon nitride (SiNx) deposition technique, here we demonstrate a hybrid structure fabricated by directly depositing high-quality SiNx on organic polymer film Poly[2-(2',5′-bis(2”-ethylhexyloxy)- phenyl) −1,4-phenylene vinylene] (BEHP-PPV). Stacked BEHP-PPV/SiNx hybrid structures with different periods are obtained and their optical properties are systematically characterized. Moreover, a group of BEHP-PPV embedded SiNx micro-disks are fabricated and amplification of spontaneous emission (ASE) is observed under optical pumping, further confirming that BEHP-PPV remains stable after the whole fabrication process. Our technique offers a platform to fabricate organic/inorganic hybrid optical devices compatible with integrated components.

Original languageEnglish
Pages (from-to)33527-33533
Number of pages7
JournalOptics Express
Issue number26
Early online date22 Dec 2017
Publication statusPublished - 25 Dec 2017


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