Hybrid light-emitting polymer/SiN_x platform for photonic integration

Organic semiconductors have potentials for a broad range of applications. However, they are difficult to be integrated with traditional inorganic material to meet the need of further applications. Based on low-temperature silicon nitride (SiN_x) deposition technique, here we demonstrate a hybrid structure fabricated by directly depositing high-quality SiN_x on organic polymer film Poly[2-(2',5′-bis(2”-ethylhexyloxy)- phenyl) −1,4-phenylene vinylene] (BEHP-PPV). Stacked BEHP-PPV/SiN_x hybrid structures with different periods are obtained and their optical properties are systematically characterized. Moreover, a group of BEHP-PPV embedded SiN_x micro-disks are fabricated and amplification of spontaneous emission (ASE) is observed under optical pumping, further confirming that BEHP-PPV remains stable after the whole fabrication process. Our technique offers a platform to fabricate organic/inorganic hybrid optical devices compatible with integrated components.