In situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films

JR Petherbridge, PW May, GM Fuge, KN Rosser, MNR Ashfold

Research output: Contribution to journalArticle (Academic Journal)peer-review

38 Citations (Scopus)
Translated title of the contributionIn situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films
Original languageEnglish
Pages (from-to)301 - 306
JournalDiamond Relat.Mater
Volume11
Publication statusPublished - 2002

Bibliographical note

Publisher: Elsevier Science

Cite this