In situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films

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Translated title of the contribution	In situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films
Original language	English
Pages (from-to)	301 - 306
Journal	Diamond Relat.Mater
Volume	11
Publication status	Published - 2002

Publisher: Elsevier Science

Research Groups and Themes

@article{1aff948c713e4d4f8d40f0fa85ae7723,

title = "In situ plasma diagnostics of the chemistry behind sulfur doping of CVD diamond films",

author = "JR Petherbridge and PW May and GM Fuge and KN Rosser and MNR Ashfold",

note = "Publisher: Elsevier Science",

year = "2002",

language = "English",

volume = "11",

pages = "301 -- 306",

journal = "Diamond Relat.Mater",

publisher = "Elsevier B.V.",

}