Improvements in the structural integrity of green ceramic microcomponents by a modified soft moulding process

D Zhang, B Su, TW Button

Research output: Contribution to journalArticle (Academic Journal)

10 Citations (Scopus)

Abstract

In this paper, a soft moulding method involving the use of elastomeric poly(dimethylsiloxane) (PDMS) moulds is described for micropatterning and microfabrication of ceramic components for microelectromechanical systems (MEMS) applications. The properties and microstructure of the green bodies have a direct effect on the ability to carry out some of the moulding procedures, as well as affecting the properties of the final sintered microcomponents. High packing density and mechanical strength are required for maintaining structural integrity and resisting the demoulding forces. Centrifuging force and appropriate binder systems have been introduced in the soft moulding process, and shown to be helpful in achieving uniform and dense green microcomponents with feature sizes of
Translated title of the contributionImprovements in the structural integrity of green ceramic microcomponents by a modified soft moulding process
Original languageEnglish
Pages (from-to)645 - 650
Number of pages6
JournalJournal of the European Ceramic Society
Volume27 (2-3)
DOIs
Publication statusPublished - Feb 2007

Bibliographical note

Publisher: Elsevier

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