Initial fabrication of a micro induction gyroscope

C Shearwood, CB Williams, PH Mellor, RB Yates

Research output: Contribution to journalArticle (Academic Journal)peer-review

34 Citations (Scopus)
Translated title of the contributionInitial fabrication of a micro induction gyroscope
Original languageEnglish
Pages (from-to)531 - 534
JournalJournal of Microelectronics Engineering
Volume30
Publication statusPublished - 1996

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