Translated title of the contribution | Initial fabrication of a micro induction gyroscope |
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Original language | English |
Pages (from-to) | 531 - 534 |
Journal | Journal of Microelectronics Engineering |
Volume | 30 |
Publication status | Published - 1996 |
Initial fabrication of a micro induction gyroscope
C Shearwood, CB Williams, PH Mellor, RB Yates
Research output: Contribution to journal › Article (Academic Journal) › peer-review
35
Citations
(Scopus)