Investigation of the addition of nitrogen-containing gases to a hot filament CVD reator

PW May, PR Burridge, CA Rego, RS Tsang, MNR Ashfold, KN Rosser, RE Tanner, D Cherns, R Vincent

Research output: Contribution to journalArticle (Academic Journal)peer-review

Translated title of the contributionInvestigation of the addition of nitrogen-containing gases to a hot filament CVD reator
Original languageEnglish
Pages (from-to)354 - 358
JournalDiamond Rel.Mater
Volume5
Publication statusPublished - 1996

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