Investigation of the addition of nitrogen-containing gases to a hot filament CVD reator

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Translated title of the contribution	Investigation of the addition of nitrogen-containing gases to a hot filament CVD reator
Original language	English
Pages (from-to)	354 - 358
Journal	Diamond Rel.Mater
Volume	5
Publication status	Published - 1996

Research Groups and Themes

@article{6dbc0a89f88b47c6a7012e3d3b960924,

title = "Investigation of the addition of nitrogen-containing gases to a hot filament CVD reator",

author = "PW May and PR Burridge and CA Rego and RS Tsang and MNR Ashfold and KN Rosser and RE Tanner and D Cherns and R Vincent",

year = "1996",

language = "English",

volume = "5",

pages = "354 -- 358",

journal = "Diamond Rel.Mater",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Investigation of the addition of nitrogen-containing gases to a hot filament CVD reator

AU - May, PW

AU - Burridge, PR

AU - Rego, CA

AU - Tsang, RS

AU - Ashfold, MNR

AU - Rosser, KN

AU - Tanner, RE

AU - Cherns, D

AU - Vincent, R

PY - 1996

Y1 - 1996

M3 - Article (Academic Journal)

VL - 5

SP - 354

EP - 358

JO - Diamond Rel.Mater

JF - Diamond Rel.Mater

ER -