Investigations of the gas phase chemistry in a hot filament CVD reactor operating with CH4/N2/H2 and CH4/NH3/H2 gas mixtures

Investigations of the gas phase chemistry in a hot filament CVD reactor operating with CH₄/N₂/H₂ and CH₄/NH₃/H₂ gas mixtures

YuA Mankelevich, NV Suetin, JA Smith, MNR Ashfold

Research output: Contribution to journal › Article (Academic Journal) › peer-review

21 Citations (Scopus)

Translated title of the contribution	Investigations of the gas phase chemistry in a hot filament CVD reactor operating with CH₄/N₂/H₂ and CH₄/NH₃/H₂ gas mixtures
Original language	English
Pages (from-to)	567 - 572
Journal	Diamond.Relat.Mater
Volume	11
Publication status	Published - 2002

Publisher: Elsevier Science

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title = "Investigations of the gas phase chemistry in a hot filament CVD reactor operating with CH4/N2/H2 and CH4/NH3/H2 gas mixtures",

author = "YuA Mankelevich and NV Suetin and JA Smith and MNR Ashfold",

note = "Publisher: Elsevier Science",

year = "2002",

language = "English",

volume = "11",

pages = "567 -- 572",

journal = "Diamond.Relat.Mater",

publisher = "Elsevier",

}

TY - JOUR

T1 - Investigations of the gas phase chemistry in a hot filament CVD reactor operating with CH4/N2/H2 and CH4/NH3/H2 gas mixtures

AU - Mankelevich, YuA

AU - Suetin, NV

AU - Smith, JA

AU - Ashfold, MNR

N1 - Publisher: Elsevier Science

PY - 2002

Y1 - 2002

M3 - Article (Academic Journal)

VL - 11

SP - 567

EP - 572

JO - Diamond.Relat.Mater

JF - Diamond.Relat.Mater

ER -