Ion energy and angular distributions at the anode of RF etch reactors

PW May, D Field, DF Klemperer, YP Song

Research output: Contribution to journal › Article (Academic Journal) › peer-review

1 Citation (Scopus)

Translated title of the contribution	Ion energy and angular distributions at the anode of RF etch reactors
Original language	English
Pages (from-to)	257 - 264
Number of pages	7
Journal	Journal of Physics Condensed Matter
Volume	3
Publication status	Published - 1991

Other: # Pages S257-S264

Handle.net

@article{11e8a0c9293340edb59a3b505a75761a,

title = "Ion energy and angular distributions at the anode of RF etch reactors",

author = "PW May and D Field and DF Klemperer and YP Song",

note = "Other: # Pages S257-S264",

year = "1991",

language = "English",

volume = "3",

pages = "257 -- 264",

journal = "Journal of Physics Condensed Matter",

issn = "0953-8984",

publisher = "IOP Publishing",

}