Ion energy distributions at the anode of a reactive ion etcher

AC Dickenson, D Field, DF Klemperer, PW May

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Ion energy distributions at the anode of a reactive ion etcher
Original language	English
Title of host publication	Unknown
Pages	1278 - 1283
Number of pages	5
Volume	4
Publication status	Published - 1993

Conference Proceedings/Title of Journal: 11th Int. Symp. on Plasma Chem

Research Groups and Themes

@inproceedings{b113657dd5b141a59386c202b31e6e4b,

title = "Ion energy distributions at the anode of a reactive ion etcher",

author = "AC Dickenson and D Field and DF Klemperer and PW May",

note = "Conference Proceedings/Title of Journal: 11th Int. Symp. on Plasma Chem",

year = "1993",

language = "English",

volume = "4",

pages = "1278 -- 1283",

booktitle = "Unknown",

}