Ion energy distributions in RF discharges

D Field, DF Klemperer, PW May, YP Song

Research output: Contribution to journalArticle (Academic Journal)peer-review

49 Citations (Scopus)
Translated title of the contributionIon energy distributions in RF discharges
Original languageEnglish
Pages (from-to)82 - 92
Number of pages10
JournalJournal of Applied Physics
Volume70
Publication statusPublished - 1991

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