Ion energy distributions in RF discharges

D Field, DF Klemperer, PW May, YP Song

Research output: Contribution to journal › Article (Academic Journal) › peer-review

50 Citations (Scopus)

Translated title of the contribution	Ion energy distributions in RF discharges
Original language	English
Pages (from-to)	82 - 92
Number of pages	10
Journal	Journal of Applied Physics
Volume	70
Publication status	Published - 1991

Research Groups and Themes

@article{538a31b405e74b4093b662d9530f106d,

title = "Ion energy distributions in RF discharges",

author = "D Field and DF Klemperer and PW May and YP Song",

year = "1991",

language = "English",

volume = "70",

pages = "82 -- 92",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics (AIP)",

}