Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching

M Saunders, PA Midgley, R Vincent

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Translated title of the contributionMeasurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching
Original languageEnglish
Title of host publicationUnknown
Pages149 - 152
Volume147
Publication statusPublished - 1995

Bibliographical note

Conference Proceedings/Title of Journal: Inst. Phys. Conf. Ser

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