Translated title of the contribution | Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching |
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Original language | English |
Title of host publication | Unknown |
Pages | 149 - 152 |
Volume | 147 |
Publication status | Published - 1995 |
Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching
M Saunders, PA Midgley, R Vincent
Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)