Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching

M Saunders, PA Midgley, R Vincent

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching
Original language	English
Title of host publication	Unknown
Pages	149 - 152
Volume	147
Publication status	Published - 1995

Conference Proceedings/Title of Journal: Inst. Phys. Conf. Ser

Handle.net

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title = "Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching",

author = "M Saunders and PA Midgley and R Vincent",

note = "Conference Proceedings/Title of Journal: Inst. Phys. Conf. Ser",

year = "1995",

language = "English",

isbn = "075033573",

volume = "147",

pages = "149 -- 152",

booktitle = "Unknown",

}

TY - GEN

T1 - Measurement of doping concentrations in silicon by convergent beam electron diffraction (CBED) pattern matching

AU - Saunders, M

AU - Midgley, PA

AU - Vincent, R

N1 - Conference Proceedings/Title of Journal: Inst. Phys. Conf. Ser

PY - 1995

Y1 - 1995

M3 - Conference Contribution (Conference Proceeding)

SN - 075033573

VL - 147

SP - 149

EP - 152

BT - Unknown

ER -