MEMS inertial power generators for biomedical applications

P Miao, PD Mitcheson, AS Holmes, EM Yeatman, TC Green, BH Stark

Research output: Contribution to journalArticle (Academic Journal)peer-review

160 Citations (Scopus)


An inertial vibration scavenging micro-generator is described which is suitable for biomedical applications. MEMS fabrication techniques have been used to construct a variable capacitor having one moving plate on which a proof mass is attached. Energy is extracted when the plates separate at constant charge. This device is non-resonant, so can operate over a wide range of excitation frequencies and amplitudes. The energy extracted per cycle, 120 nJ, is well above previous reports. The fabrication techniques employed are described, and test data are given and compared to modeling results, showing good agreement.
Translated title of the contributionMEMS inertial power generators for biomedical applications
Original languageEnglish
Pages (from-to)1079 - 1083
Number of pages5
JournalMicrosystem Technologies
Volume12 (10-11)
Publication statusPublished - Sept 2006

Bibliographical note

Publisher: Springer-Verlag


Dive into the research topics of 'MEMS inertial power generators for biomedical applications'. Together they form a unique fingerprint.

Cite this