MEMS inertial power generators for biomedical applications

P Miao, PD Mitcheson, AS Holmes, EM Yeatman, TC Green, BH Stark

Research output: Contribution to journalArticle (Academic Journal)

136 Citations (Scopus)

Abstract

An inertial vibration scavenging micro-generator is described which is suitable for biomedical applications. MEMS fabrication techniques have been used to construct a variable capacitor having one moving plate on which a proof mass is attached. Energy is extracted when the plates separate at constant charge. This device is non-resonant, so can operate over a wide range of excitation frequencies and amplitudes. The energy extracted per cycle, 120 nJ, is well above previous reports. The fabrication techniques employed are described, and test data are given and compared to modeling results, showing good agreement.
Translated title of the contributionMEMS inertial power generators for biomedical applications
Original languageEnglish
Pages (from-to)1079 - 1083
Number of pages5
JournalMicrosystem Technologies
Volume12 (10-11)
DOIs
Publication statusPublished - Sep 2006

Bibliographical note

Publisher: Springer-Verlag

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    Miao, P., Mitcheson, PD., Holmes, AS., Yeatman, EM., Green, TC., & Stark, BH. (2006). MEMS inertial power generators for biomedical applications. Microsystem Technologies, 12 (10-11), 1079 - 1083. https://doi.org/10.1007/s00542-006-0152-9