Micro-scale cantilever testing of linear elastic and elastic-plastic materials

J. E. Darnbrough*, S. Mahalingam, P. E. J. Flewitt

*Corresponding author for this work

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

4 Citations (Scopus)

Abstract

It is increasingly a requirement to be able to determine the mechanical properties of materials: (i) at the micro-scale, (ii) that are in the form of surface coatings and (iii) that have nanoscale microstructures. As a consequence micro-scale testing is an important tool that has been developed to aid the evaluation of the mechanical properties of such materials. In this work cantilever beam specimens (typically 2 mu m by 2 mu m by 10 mu m in size) have been prepared by gallium ion milling and then deformed in-situ within a FEI Helios Dual Beam workstation. The latter is achieved using a force probe with a geometry suitable for loading the micro-scale test specimens. Thus force and displacement can be measured together with observing the deformation and fracture of the individual specimens. This paper considers the evaluation of the mechanical properties in particular elastic modulus, yield strength and fracture strength of materials that result in relatively large deflections to the micro-scale cantilever beams. Two materials are considered the first is linear elastic single crystal silicon and the other elastic-plastic nanocrystalline (nc) nickel. The results are discussed with respect to the reproducibility of this method of mechanical testing and the evaluated properties are compared with those derived by alternative procedures.

Original languageEnglish
Title of host publicationADVANCES IN FRACTURE AND DAMAGE MECHANICS XI
EditorsQF Li, YL Li, MH Aliabadi
Place of PublicationSTAFA-ZURICH
PublisherTrans Tech Publications Inc
Pages57-60
Number of pages4
ISBN (Print)*****************
DOIs
Publication statusPublished - 2013
Event11th International Conference on Fracture and Damage Mechanics - Xi'an, China
Duration: 18 Sep 201221 Sep 2012

Publication series

NameKey Engineering Materials
PublisherTRANS TECH PUBLICATIONS LTD
Volume525-526
ISSN (Print)1013-9826

Conference

Conference11th International Conference on Fracture and Damage Mechanics
CountryChina
CityXi'an
Period18/09/1221/09/12

Keywords

  • micro-scale testing
  • cantilever specimens
  • elastic deformation
  • elastic-plastic deformation
  • silicon
  • nanocrystalline nickel
  • FRACTURE
  • SILICON

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