Translated title of the contribution | Microfabrication of three-dimensional free-standing ceramic MEMS components by soft moulding |
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Original language | English |
Pages (from-to) | 924 - 927 |
Number of pages | 4 |
Journal | Advanced Engineering Materials |
Volume | 12 |
Publication status | Published - 2003 |
Microfabrication of three-dimensional free-standing ceramic MEMS components by soft moulding
D Zhang, B Su, TW Button
Research output: Contribution to journal › Article (Academic Journal) › peer-review
21
Citations
(Scopus)