Microfabrication of three-dimensional free-standing ceramic MEMS components by soft moulding

D Zhang, B Su, TW Button

Research output: Contribution to journalArticle (Academic Journal)

20 Citations (Scopus)
Translated title of the contributionMicrofabrication of three-dimensional free-standing ceramic MEMS components by soft moulding
Original languageEnglish
Pages (from-to)924 - 927
Number of pages4
JournalAdvanced Engineering Materials
Volume12
Publication statusPublished - 2003

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