Microfabrication of three-dimensional free-standing ceramic MEMS components by soft moulding

D Zhang, B Su, TW Button

Research output: Contribution to journal › Article (Academic Journal) › peer-review

21 Citations (Scopus)

Translated title of the contribution	Microfabrication of three-dimensional free-standing ceramic MEMS components by soft moulding
Original language	English
Pages (from-to)	924 - 927
Number of pages	4
Journal	Advanced Engineering Materials
Volume	12
Publication status	Published - 2003

Handle.net

@article{0c415a898f6a4ab489397a6d5188b4fe,

title = "Microfabrication of three-dimensional free-standing ceramic MEMS components by soft moulding",

author = "D Zhang and B Su and TW Button",

year = "2003",

language = "English",

volume = "12",

pages = "924 -- 927",

journal = "Advanced Engineering Materials",

issn = "1527-2648",

publisher = "Wiley-VCH Verlag",

}