Micromachining and focused ion beam etching of Si for accelerometers

DF Moore, SC Burgess, H-S Chiang, H Klaubert, N Shibaike, T Kiriyama

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

12 Citations (Scopus)
Translated title of the contributionMicromachining and focused ion beam etching of Si for accelerometers
Original languageEnglish
Title of host publicationSPIE's Symposium on Micromachining, Texas, USA
Pages253 - 258
Volume2639
Publication statusPublished - Oct 1995

Bibliographical note

Conference Organiser: SPIE

Cite this