| Translated title of the contribution | Microstructural analysis of W/Si films grown by LPCVD |
|---|---|
| Original language | English |
| Title of host publication | Unknown |
| Pages | 225 - 228 |
| Number of pages | 3 |
| Volume | 119 |
| Publication status | Published - 1991 |
Microstructural analysis of W/Si films grown by LPCVD
Y Atici, D Cherns, H Nicholls
Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)
1
Citation
(Scopus)