Microwave plasma-activated chemical vapour deposition of nitrogen-doped diamond, II: CH₄/N₂/H₂ plasmas

Benjamin S Truscott, Mark W Kelly, Katie J Potter, Michael N R Ashfold, Yuri A Mankelevich

Research output: Contribution to journal › Article (Academic Journal) › peer-review

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Finished
Metrology concepts for a new generation of plasma manufacturing with atom-scale precision
Ashfold, M. N. R. (Principal Investigator)
1/07/13 → 21/12/18
Project: Research
Experiment and modelling of the growth of CVD diamond: towards a detailed understanding of growth chemistry and mechanisms
May, P. W. (Principal Investigator)
1/10/10 → 1/04/14
Project: Research