Modelling NEM Relays for Digital Circuit Applications

Sunil Rana, Tian Qin, Dinesh Pamunuwa, Daniel Grogg, Michel Despont, Yu Pu, Christoph Hagleitner

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

7 Citations (Scopus)


A reduced-order model for NEM relays is presented that combines electro-mechanical beam actuation and landing of beam tip on the surface electrode. This model shows a deviation of less than 2%, for the DC as well as the transient response for beam actuation in a circuit simulation, when compared to a finite-element simulation. It also shows an excellent match for the energy. The model allows accurate circuit simulation to aid in NEM-relay based logic design, and facilitates the quantification of key gate-level metrics.
Original languageEnglish
Title of host publicationProceedings - IEEE International Symposium on Circuits and Systems
Number of pages4
Publication statusPublished - 1 May 2013
Event2013 IEEE International Symposium on Circuits and Systems, ISCAS 2013 - Beijing, China
Duration: 19 May 201323 May 2013


Conference2013 IEEE International Symposium on Circuits and Systems, ISCAS 2013

Structured keywords

  • Photonics and Quantum


  • electrodes
  • finite element analysis
  • logic design
  • nanoelectromechanical devices
  • relays
  • NEM-relay based logic design
  • circuit simulation
  • digital circuit applications
  • electromechanical beam actuation
  • finite-element simulation
  • key gate-level metric quantification
  • reduced-order model
  • surface electrode
  • Capacitors
  • Computational modeling
  • Integrated circuit modeling
  • Logic gates
  • Mathematical model
  • Read only memory
  • Relays


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