Modelling of the gas phase chemistry during diamond CVD: the role of different hydrocarbon species

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Translated title of the contribution	Modelling of the gas phase chemistry during diamond CVD: the role of different hydrocarbon species
Original language	English
Pages (from-to)	242 - 245
Journal	Diamond Rel. Mater
Volume	8
Publication status	Published - 1999

Publisher: Elsevier Science

Handle.net

@article{73b018308860435bb4282b670dbbceef,

title = "Modelling of the gas phase chemistry during diamond CVD: the role of different hydrocarbon species",

author = "RS Tsang and PW May and MNR Ashfold",

note = "Publisher: Elsevier Science",

year = "1999",

language = "English",

volume = "8",

pages = "242 -- 245",

journal = "Diamond Rel. Mater",

publisher = "Elsevier",

}