Modelling of the gas-phase chemistry in C-H-O gas mixtures for diamond chemical vapour deposition

JR Petherbridge, PW May, MNR Ashfold

Research output: Contribution to journalArticle (Academic Journal)peer-review

Translated title of the contributionModelling of the gas-phase chemistry in C-H-O gas mixtures for diamond chemical vapour deposition
Original languageEnglish
Pages (from-to)5219 - 5223
JournalJournal of Applied Physics
Volume89
Publication statusPublished - 2001

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