Modelling of the gas-phase chemistry in C-H-O gas mixtures for diamond chemical vapour deposition

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Translated title of the contribution	Modelling of the gas-phase chemistry in C-H-O gas mixtures for diamond chemical vapour deposition
Original language	English
Pages (from-to)	5219 - 5223
Journal	Journal of Applied Physics
Volume	89
Publication status	Published - 2001

Cite this

@article{f33aaa45e37e44978c082c6dbe901811,

title = "Modelling of the gas-phase chemistry in C-H-O gas mixtures for diamond chemical vapour deposition",

author = "JR Petherbridge and PW May and MNR Ashfold",

year = "2001",

language = "English",

volume = "89",

pages = "5219 -- 5223",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics (AIP)",

}