Modelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma

IM Hedgecock, AC Dickenson, D Field, DF Klemperer

    Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

    Translated title of the contributionModelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma
    Original languageEnglish
    Title of host publicationUnknown
    Pages1327 - 1332
    Number of pages5
    Volume4
    Publication statusPublished - 1993

    Bibliographical note

    Conference Proceedings/Title of Journal: 11th Intl. Symp. on Plasma Chem

    Cite this

    Hedgecock, IM., Dickenson, AC., Field, D., & Klemperer, DF. (1993). Modelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma. In Unknown (Vol. 4, pp. 1327 - 1332)