Modelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma

IM Hedgecock, AC Dickenson, D Field, DF Klemperer

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Translated title of the contribution	Modelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma
Original language	English
Title of host publication	Unknown
Pages	1327 - 1332
Number of pages	5
Volume	4
Publication status	Published - 1993

Conference Proceedings/Title of Journal: 11th Intl. Symp. on Plasma Chem

Handle.net

@inproceedings{28156b3caf484c5b8563658a40788d2c,

title = "Modelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma",

author = "IM Hedgecock and AC Dickenson and D Field and DF Klemperer",

note = "Conference Proceedings/Title of Journal: 11th Intl. Symp. on Plasma Chem",

year = "1993",

language = "English",

volume = "4",

pages = "1327 -- 1332",

booktitle = "Unknown",

}

TY - GEN

T1 - Modelling radio-frequency discharges: comparison of measured and simulated ion energy distributions in a hydrogen plasma

AU - Hedgecock, IM

AU - Dickenson, AC

AU - Field, D

AU - Klemperer, DF

N1 - Conference Proceedings/Title of Journal: 11th Intl. Symp. on Plasma Chem

PY - 1993

Y1 - 1993

M3 - Conference Contribution (Conference Proceeding)

VL - 4

SP - 1327

EP - 1332

BT - Unknown

ER -