Modelling radio frequency discharges: effects of collisions upon ion and neutral particle energy distributions

D Field, DF Klemperer, PW May

Research output: Contribution to journalArticle (Academic Journal)

49 Citations (Scopus)
Translated title of the contributionModelling radio frequency discharges: effects of collisions upon ion and neutral particle energy distributions
Original languageEnglish
Pages (from-to)3721 - 3730
Number of pages9
JournalJournal of Applied Physics
Volume71
Publication statusPublished - 1992

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