Modelling radio frequency discharges: effects of collisions upon ion and neutral particle energy distributions

D Field, DF Klemperer, PW May

Research output: Contribution to journal › Article (Academic Journal) › peer-review

49 Citations (Scopus)

Translated title of the contribution	Modelling radio frequency discharges: effects of collisions upon ion and neutral particle energy distributions
Original language	English
Pages (from-to)	3721 - 3730
Number of pages	9
Journal	Journal of Applied Physics
Volume	71
Publication status	Published - 1992

Handle.net

@article{e5493d3e6b7a45d0bf9415be41a124be,

title = "Modelling radio frequency discharges: effects of collisions upon ion and neutral particle energy distributions",

author = "D Field and DF Klemperer and PW May",

year = "1992",

language = "English",

volume = "71",

pages = "3721 -- 3730",

journal = "Journal of Applied Physics",

issn = "1089-7550",

publisher = "American Institute of Physics (AIP)",

}