Moment-driven bifurcated non-volatile nano-electromechanical relay

Sunil Rana (Inventor), Dinesh Pamunuwa (Inventor)

Research output: Patent

68 Downloads (Pure)

Abstract

A micro or nano electro-mechanical relay device (10) comprising: a source electrode (204); an electrically conductive beam (202) comprising an arcuate portion (12a ) coupled to the source electrode by an arm portion, the arm portion comprising a flexible hinge portion (12c), the flexible hinge portion being less stiff than the arcuate portion; first and second drain electrodes (DE1, DE2); and first and second actuator electrodes (AE1, AE2), wherein: the arc of the arcuate portion defines a beam axis (BA); the flexible hinge portion mounts the beam for pivotal movement about a pivot axis (PA) which is closer to the beam axis than the arcuate portion; the first actuator electrode is arranged to bias the beam to pivot about the beam axis in a first direction into electrical contact with the first drain electrode; the second actuator electrode is arranged to bias the beam to pivot about the beam axis in a second direction opposite to the first direction into electrical contact with the second drain electrode; the first actuator electrode has a first arcuate surface facing the beam, the first arcuate surface defining a first axis which is generally coaxial with respect to the beam axis; and the second actuator electrode has a second arcuate surface facing the beam, the second arcuate surface defining a second axis which is generally coaxial with respect to the beam axis, such that while the beam pivots about the pivot axis there is a first generally gate gap between the first arcuate surface and the beam, and a second generally gate gap between the second arcuate surface and the beam.
Original languageEnglish
Patent number1721670.6
Publication statusSubmitted - 21 Dec 2017

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