Nano-crystalline graphite coated SOI NEMS switches

L.A. Boodhoo, S. Rana, J.D. Reynolds, Y. Tsuchiya, W. Redman-White, S. H. Pu, H. Mitzuta, D. Pamunuwa, H. M. H Chong

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Original languageEnglish
Title of host publicationProc. Int. Microprocesses and Nanotechnology Conf.
Publication statusPublished - 1 Nov 2016

Cite this

Boodhoo, L. A., Rana, S., Reynolds, J. D., Tsuchiya, Y., Redman-White, W., Pu, S. H., Mitzuta, H., Pamunuwa, D., & Chong, H. M. H. (2016). Nano-crystalline graphite coated SOI NEMS switches. In Proc. Int. Microprocesses and Nanotechnology Conf.