Nanofabricated solid immersion lenses registered to single emitters in diamond

L. Marseglia, J. P. Hadden, Antony C Stanley-Clarke, J. P. Harrison, B. Patton, Y.-L. D. Ho, B. Naydenov, F. Jelezko, J. Meijer, P. R. Dolan, J. M. Smith, J. G. Rarity, Jeremy L O'Brien

Research output: Contribution to journalArticle (Academic Journal)peer-review

77 Citations (Scopus)
337 Downloads (Pure)


We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 m diameter hemisphere positioned with single negatively charged nitrogen-vacancy defect lies at its origin. Direct comparison of the fluorescence photon count rate before and after fabrication shows an eightfold increase due to the presence of the hemisphere.
Translated title of the contributionNanofabricated solid immersion lenses registered to single emitters in diamond
Original languageEnglish
Pages (from-to)133107
Number of pages3
JournalApplied Physics Letters
Issue number13
Publication statusPublished - 2011

Bibliographical note

Other: Preprint - arXiv:1012.1135 - (

Fingerprint Dive into the research topics of 'Nanofabricated solid immersion lenses registered to single emitters in diamond'. Together they form a unique fingerprint.

Cite this