Nanofabrication Using Focused Ion and Electron Beams - Principles and Applications: PART II - APPLICATIONS: 18. FIB Etching for Photonic Device Applications

Research output: Chapter in Book/Report/Conference proceedingChapter in a book

Original languageEnglish
Title of host publicationOxford University Press (USA)
EditorsIvo Utke, Stanislav Moshkalev, Phillip E. Russell
Pages553-583
Number of pages31
Publication statusPublished - Apr 2012

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