Original language | English |
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Title of host publication | Oxford University Press (USA) |
Editors | Ivo Utke, Stanislav Moshkalev, Phillip E. Russell |
Pages | 553-583 |
Number of pages | 31 |
Publication status | Published - Apr 2012 |
Nanofabrication Using Focused Ion and Electron Beams - Principles and Applications: PART II - APPLICATIONS: 18. FIB Etching for Photonic Device Applications
Martin J Cryan, Y D Ho, Pavlo Ivanov, Peter J Heard, Judy M Rorison, John Rarity
Research output: Chapter in Book/Report/Conference proceeding › Chapter in a book