All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.
|Title of host publication||PHOTONIC CRYSTAL MATERIALS AND DEVICES IX|
|Editors||HR Miguez, SG Romanov, LC Andreani, C Seassal|
|Publication status||Published - 2010|
|Name||Proceedings of SPIE-The International Society for Optical Engineering|
Conference on Photonic Crystal Materials and Devices IX, Brussels, BELGIUM, APR 12-15, 2010