Nanometre control and determination of hole size in photonic crystal slabs

Daryl M. Beggs; Liam O'Faolain; Thomas F. Krauss

doi:10.1117/12.854969

Nanometre control and determination of hole size in photonic crystal slabs

Daryl M. Beggs, Liam O'Faolain, Thomas F. Krauss

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

Abstract

All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.

Original language	Undefined/Unknown
Title of host publication	PHOTONIC CRYSTAL MATERIALS AND DEVICES IX
Editors	HR Miguez, SG Romanov, LC Andreani, C Seassal
Volume	7713
DOIs	https://doi.org/10.1117/12.854969
Publication status	Published - 2010

Publication series

Name	Proceedings of SPIE-The International Society for Optical Engineering

Bibliographical note

Conference on Photonic Crystal Materials and Devices IX, Brussels, BELGIUM, APR 12-15, 2010

Access to Document

10.1117/12.854969

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Cite this

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title = "Nanometre control and determination of hole size in photonic crystal slabs",

abstract = "All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.",

author = "Beggs, {Daryl M.} and Liam O'Faolain and Krauss, {Thomas F.}",

note = "Conference on Photonic Crystal Materials and Devices IX, Brussels, BELGIUM, APR 12-15, 2010",

year = "2010",

doi = "10.1117/12.854969",

language = "Undefined/Unknown",

volume = "7713",

series = "Proceedings of SPIE-The International Society for Optical Engineering",

editor = "HR Miguez and SG Romanov and LC Andreani and C Seassal",

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}

Nanometre control and determination of hole size in photonic crystal slabs. / Beggs, Daryl M.; O'Faolain, Liam; Krauss, Thomas F.
PHOTONIC CRYSTAL MATERIALS AND DEVICES IX. ed. / HR Miguez; SG Romanov; LC Andreani; C Seassal. Vol. 7713 2010. (Proceedings of SPIE-The International Society for Optical Engineering).

Research output: Chapter in Book/Report/Conference proceeding › Conference Contribution (Conference Proceeding)

TY - GEN

T1 - Nanometre control and determination of hole size in photonic crystal slabs

AU - Beggs, Daryl M.

AU - O'Faolain, Liam

AU - Krauss, Thomas F.

N1 - Conference on Photonic Crystal Materials and Devices IX, Brussels, BELGIUM, APR 12-15, 2010

PY - 2010

Y1 - 2010

N2 - All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.

AB - All photonic crystal slab designs rely on the accurate control of the sizes of the holes during fabrication - a small error of just a few nanometers can mean a shift of tens of nanometers in the operating wavelength of the device. A key problem is the measurement of the hole size. We have developed an optical method which determines the functional hole diameter with a typical accuracy of 5 nm. We also suggest a way for the nanometre control of the hole diameter.

U2 - 10.1117/12.854969

DO - 10.1117/12.854969

M3 - Conference Contribution (Conference Proceeding)

VL - 7713

T3 - Proceedings of SPIE-The International Society for Optical Engineering

BT - PHOTONIC CRYSTAL MATERIALS AND DEVICES IX

A2 - Miguez, HR

A2 - Romanov, SG

A2 - Andreani, LC

A2 - Seassal, C

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