Nanoscale phosphorus atom arrays created using STM for the fabrication of a silicon based quantum computer

JL O'Brien, SR Schofield, MY Simmons, RG Clark, AS Dzurak, NJ Curson, BE Kane, NS Mcalpine, ME Hawley, GW Brown

Research output: Chapter in Book/Report/Conference proceedingConference Contribution (Conference Proceeding)

Abstract

Quantum computers offer tile promise of formidable computational power for certain tasks. Of the various possible physical implementations of such a device, silicon based architectures are attractive for their scalability and ease of integration with existing silicon technology. These designs use either the electron or nuclear spin state of single donor atoms to store quantum information. Here we describe a strategy to fabricate an array of single phosphorus atoms in silicon for the construction of such a silicon based quantum computer. We demonstrate tile controlled placement of single phosphorus bearing molecules on a silicon surface. This has been achieved by patterning a hydrogen mono-layer "resist" with a scanning tunneling microscope (STM) tip and exposing the patterned surface to phosphine. (PH3) molecules. We also describe preliminary studies into a process to incorporate these surface phosphorus atoms into the silicon crystal at tile array sites.
Translated title of the contributionNanoscale phosphorus atom arrays created using STM for the fabrication of a silicon based quantum computer
Original languageEnglish
Title of host publicationSymposium on BioMEMS and Smart Nanostructures, SPIE 4590
PublisherSociety of Photo-Optical Instrumentation Engineers (SPIE)
Pages299 - 309
Number of pages11
Volume4590
ISBN (Print)0819443204
Publication statusPublished - Dec 2001

Bibliographical note

Other: Proceedings of the Society of Photo-Optical Instrumentation Engineers (SPIE) , Volume: 4590

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